2010 SUSS MicroTec Gamma

Manufacturer: SUSS

Model: MicroTec Gamma

Year of Manufacture: 2010

CE Marked: Yes

Electrical Specifications:

• Voltage: 400V, 3-phase +N+PE
• Power: 22 kVA, 50 Hz
• AIC: 100 kA / 400V
• FLC: 32 A

Pneumatic Requirements:

• CDA (Clean Dry Air): 5 bar
• Nitrogen (N₂): 5 bar
• Vacuum (VAC): -0.8 bar
• Deionized Water (DIW): 5 bar

System Overview:

High-performance automated coater/developer system designed for semiconductor and MEMS processing. Ideal for 4" to 8" wafers.

• Wafer Size: 4-fold I/O for 4"–8" wafers
• Software: Version 4.41c(23)
• Operating System: Windows XP Professional, Version 2002, Service Pack 3
• Processor: 2.0 GHz
• Memory: 500 MB RAM

Configuration :

• 4-fold I/O with Sankio double gripper
• 2 Developer Modules (1 medium size)
• 1 Coating Module (2 lacquers, IDI)
• 7 Hot Plates (HP)
• 2 Chill Plates (CP)
• 1 Flood Exposure Unit
• Mechanical Centering
• Media Cabinet
• Control Cabinet
• 4x Julabo Temperature Controllers

Find more here - https://www.ucymachines.com/

Contact us at - sales@ucymachines.com