2016 DIENER Tetra 30

Manufacturer: DIENER Electronic GmbH + Co. KG     PLASMACLEANER

Type designation: TRETRA 30

Year of manufacture: 2016    

Still in operation: No     

Operating manual available:  Yes

CE declaration available: Yes

Data sheet: N/A    

Service reports available: N/A

Where the machine is located: Factory hall

Can it be inspected: Yes

Ev.accessories: N/A

Tetra 30

Low pressure plasma systems

Low pressure plasma systems

for plasma cleaning, activation, etching and coating

Dimensions housing (19" rack)

(with connections)

width approx. 600 mm

height approx. 1700 mm

depth approx. 800 mm

Weight approx. 250 kg (without pump)

Vacuum chambers

Stainless steel or aluminum

Rectangular, door with hinge

width approx. 305 mm

Height approx. 300 mm

Depth approx. 370 or 625 mm

Chamber volume

Approx. 34 l - 57 l

Gas supply

Mass Flow Controller (MFC)

Generator Frequencies

80 kHz Power 1000 W or 3000 W

13.56 MHz Power 0 - 300 W; 0 - 600 W

2.45 GHz Power 0 - 600 W; 0 - 1200 W

All generators are continuously variable

from 0 - 100

Electrodes

Single or multiple electrodes

RIE electrode with gas shower

Control hardware

PCCE control (Microsoft Windows CE)

PC control (Microsoft Windows 10 IoT)

Pressure measurement

Pirani

Capacitance manometer (for corrosive gas version)

Power supply

230 or 400 V / 3 phases

Vacuum pump

In different sizes and from different

manufacturers (with activated carbon filter if required)

Low pressure plasma systems

Low pressure plasma systems

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